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1. Select the Mapping workspace. Use high count rate for good count statistics.
2. Click on the Scan configurator to set Image resolution, Mapping dwell time and Line average. Image resolution defines the pixel resolution.
3. Click on the Capture button to open the Capture parameters menu. Adjust Capture parameters for the image: set single or continuous.
4. Capture an image.
5. Click on the Acquire button and set parameters for
1. Map time: Mapping is automatically terminated if Measurement time [s] or Cycles is set. When Manual is selected acquisition has to be stopped manually by clicking the Acquire button. One click terminates the scan after finishing the last frame, the button will change to Stop. Another click on the Stop button terminates the measurement immediately.
2. Map area: Choose as Map area: Full, Fixed or Variable and the Map width or Map heights in [μm]. Choose the number of acquisition Points or the Point distance in [μm]. Points are equal to pixels in the map. The number of points alters the distance between points and the electron beam spot size shown in the display on the left side. The calculation of the spot size depends on the used high voltage.
3. After measurement: Set microscope to turn off the HV after measurement.??????? Select Save data to save the data automatically after acquisition. In the pop up dialog the file name and the data storage location can be chosen.
6. Acquire a map. NOTE: wait time 30 minutes for 10 kcps or less, 5-20 min for 20 kcps or higher.
7. Use the workspace icon to
1. Save map data. : Use file format: ***.bcf: to save HyperMaps (datacube, hyperspectral data set). Spectra for each pixel are saved. Further processing is possible only, when data is saved as a .bcf file. ***.rtm: to save element distribution images without point spectra. ***.raw: to save hyperspectral datacube for further processing with third party softwares.
2. Save selected map data, : This is useful if only a part of the map area needs to be saved. Mark the area to be saved by drawing a rectangle in the map chart with the rectangle tool. Only the data of the area within the rectangle will be saved.
3. Add data to report.
4. Clear database. HyperMap : HyperMap database will be deleted. Element distribution images without point spectra remain as well as the selected elements. No Elements can be added/selected anymore
8. Right mouse click into the Map tab to
1. Save map image: Use image file formats (.bmp, .png, .jpg, .tif) to save the composite element image.
2. Add item to report: Composite element image will be added to the report.
9. Right mouse click into the thumbnail bar to
1. Save images: Individual element images of selected thumbnails will be saved. To select them mark the individual element images with left mouse click + SHIFT or CRTL key.
2. Add images to report. : Individual element images will be added to report.
10. Process map data as desired.

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• Check the energy-channel calibration as detailed in section 5.2 (pg. 43) of the Esprit Compact user manual. Use the Pelco standard, which contains a sample of pure Cu. Perform the energy-channel calibration using the uncoated standard at 30 kV, with the CL2 adjusted such that the EDS detector is receiving about 5 kcps.
• Check that the contrast/brightness of the best BSE image captured on an average sample looks good. If not, adjusting detector sensitivity in the EDS pop-up on the SEM software. If the image cannot be optimized, go into Systems tab to change the image parameters.

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