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Hitatchi SEM 3D Imaging Guide

V374 | March 2018
V378P

This guide is intended to assist to provide a brief overview of using 3D SEM software package included with the TM3000 SEM microscope.

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  1. Attempts to create 3D models of sputter coated specimens were unsuccessful, possibly due to the distortion in the apparent contrast of the obliquely illuminated images.
  2. In step 1, when acquiring the 3D images, the TM3000 software often complains of the specimen being out of focus. We did not have time to investigate the optimum distance ideal for this 3D imaging routine

Archive Versions

SEM 3D Imaging Guide - 24022020

LMUG-SEM3DImagingGuide-270922-1317-102.pdf 27Sept2022