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- Press the Main button (Fig. 1) under the joystick (make sure the Vacuum button stays off).
Figure 1
2. Press the middle of the joystick for ok (Fig. 2).
Figure 2
3. Checking systems (Fig. 3) screen will appear, make sure no jigs on the lapping plate and press ok to continue.
Figure 3
4. Process Screen and Machine Setup (Fig. 4) screen will appear.
Figure 4
ZEROING MONITOR
- Clean the monitor's bottom surface and diamond edges with water and a soft brush. Make sure no water gets inside the top half. Blow it dry with the air gun.
- Clean the master flat (Fig. 5) by wiping it down with a kimwipe and isopropyl alcohol.
- Place monitor on the master flat then set the weight on top of it (Fig. 5).
- Plug in long cord to the top of the monitor and LP 50 just under the slurry container (Fig. 4).
- Move the monitor around on the Master flat to let it 'bed down' to the surface.
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7. On the Machine Setup (Fig. 6) screen move the joystick down and select Monitor Set-Up. Press ok.
Figure 6
8. On the Monitor Set-Up (Fig. 7) screen there will be a Raw Plate Shape scale and an Actual Plate Shape scale.
- The Raw Plate Shape scale should stay in the range of plus or minus 10 um. If it is not 10 um right away, wait a minute and it should adjust by itself.
- The Actual Plate Shape scale will say" Averaging…". Wait until a number appears.
- Once the number appears move the joystick to the left and select Auto Zero. Press ok.
- "Zeroing Monitor" will appear on the screen. After it disappears the Actual Plate Shape should read 0.0 um.
Figure 7
d. Move the joystick to the right and select Exit. Press ok.
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- On the Process Screen and Machine Setup screen (Fig. 4) move the joystick up and select Process Screen. Press ok.
- On the Confirm Action screen (Fig. 8) move the joystick down, select and press OK.
Figure 8
3. When the Please Set Jig Positions screen (Fig. 9) appears, the monitor and jig arms need to be positioned. Do not press ok yet.
Figure 9
- Set the center cross in the middle of the lapping plate (Fig. 10).
- Place the small arm (Fig. 10), with rollers facing up, on the post that is back and to the right of the lapping plate.
- Place the monitor and weight in the arm so that it is touching the rollers on the arm.
- Disconnect the long cord that is attached to the monitor and the LP50 and reconnect the short cord (Fig. 10).
- Adjust the arm so the edge of the monitor is touching one of the sides of the center cross (Fig. 10).
- Tighten the arm down. None of the set screws should be touching the lapping plate. If any are, adjust the arm up.
Figure 10
c. Place the large arm with rollers facing up on the post that is forward and on the right side of the lapping plate.
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Figure 11
d. Remove the center cross.
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- Operating screen (Fig.12), move the joystick up and to the right. Select Abrasive and press ok.
Figure 12
2. Abrasive screen (Fig. 13), select Abrasive Drum and rotate the joystick clockwise to change it from OFF to ON
Figure 13
- If screen is left untouched for four seconds it will revert back to the Operating screen (Fig. 12). Just reselect the previous screen and press ok.
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If screen is left untouched for four seconds it will revert back to the Operating screen (Fig. 12). Just reselect the previous screen and press ok.
Figure 14
- Move joystick up and select Timer rotate clockwise to change "Disable" to "Enable".
- Move the joystick down to select Rest Timer and press ok.
- Move the joystick down to select Set Time rotate clockwise to increase time and counterclockwise to decrease time.
- Set Time to 15 minutes
- Move the joystick down to select and press OK.
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- If screen is left untouched for four seconds it will revert back to the Operating screen (Fig. 12). Just reselect the previous screen and press ok.
Figure 15
b. Rotate the joystick clockwise to increase speed and counterclockwise to decrease speed. Set the Target Plate Speed to 5 rpms.
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Figure 16
b. Wipe down the drip tray and turn off the drip monitor.
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