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    1. Each small notch on the scale is 2 um and the numbers are 10 um each.
    2. If the scale reads the same, you know the Actual Flatness is set properly. Check this daily.
      1. If it is not the same, repeat the process.
      2. If it is still off after that, you will need to maintain flatness of the plate manually.

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This document was original written by Emily Fisher ....

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